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▶ 优异的物理性能
▶ 很好地符合硬件特性
▶ 优异抗腐蚀性
▶ 优异的耐磨、耐高温性能
▶ 综合性能表现优异
静态密封:
动态密封:
晶圆传输:
Chamber seals
Flange NW/KF centering o-rings Gaskets
Fitting and union seals
Valve seals
Door seals
Lid seals
Bonded slit valve doorsEnd effector pads
Vacuum suction parts
Property
Value
ASTM
Material Type
FKM
Perfluor
Colour
Black green brown
Indoor
Hardness: (Shore A)
74
D2240
Tensile Strength (MPa)
14.8
D412
Elongation at break (%)
279
D412
100% Modulus (MPa)
5.78
D412
Compression Set (%):
70 hrs @ 204°C25
D395
Minimum Operating
Temperature-15℃
Indoor
Maximum Operating
Temperature230℃
Indoor
Coefficient of Thermal
Expansion (um/M°C)216
Indoor
▶ Lon implant
▶ Dry ashing
▶ CVD
▶ Deposition
▶ Wet etch
▶ PVD
▶ Oxidation(LPCVD) -
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2024-05-15 FF770.pdf
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