•   优异的物理性能

      很好地符合硬件特性

      优异抗腐蚀性

      优异的耐磨、耐高温性能

      综合性能表现优异

     

    优异性能
    适用场景

    静态密封:

    动态密封:

    晶圆传输:

    Chamber seals  

    Flange NW/KF centering o-rings Gaskets

    Fitting and union seals

    Valve seals
    Door seals
    Lid seals
    Bonded slit valve doors

    End effector pads  

    Vacuum suction parts

    Property 

    Value

     ASTM

     Material Type

    FKM

    Perfluor

    Colour

    Black green brown

    Indoor

     Hardness: (Shore A)

    74

    D2240

    Tensile Strength (MPa)

    14.8

    D412

    Elongation at break (%)

    279

    D412

    100% Modulus (MPa) 

    5.78

    D412

    Compression Set (%): 
    70 hrs @ 204°C 

    25

    D395

    Minimum Operating 
    Temperature 

    -15℃

    Indoor

    Maximum Operating 
    Temperature 

    230℃

    Indoor

    Coefficient of Thermal 
    Expansion (um/M°C)

    216

    Indoor

    应用制程

    ▶  Lon implant 


    ▶  Dry ashing


    ▶  CVD 

    ▶  Deposition

     

    ▶  Wet etch 

    ▶  PVD



    ▶  Oxidation(LPCVD)

    材料性能