▶ 极好的化学品溶剂耐受性

▶ 极低的金属离子含量

▶ 极低的金属离子析出物

▶ 非常好的物理机械性能

▶ 很低的压缩永久变形率

▶ 不粘黏性能优秀

▪  Dispense seals

▪  Fliter seals
▪  NW/KF/ISO centering ring
▪  Roller o-rings/seals
▪  Gas inlet o-rings
▪  Gas outlet o-rings
Reactant delivery systems

▶  Wet Etch(acid,base)


▶  Rinsing 


▶  Wet Etch
 
▶  Wet Ion/metal Planting

▶ CMP
 

▶  Wet cleaning(UPDI )

▶  Wafer Prepar

▶  Wet stripping(solvents)

▶  Pumpline