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▶ 具有极好的低温耐受性能
▶ 改善了脱模/模具污染性能与Viton®GF相比
▶ 改善了模流,减少了剪切灵敏度较低,挤出机模具膨胀率较低~65穆尼FKM
▶ 表现出相似的热量、流体和低温与Viton®GF相比
▶ 具有优异的抗压缩凝固性能
▶ 表现出相似的热量、流体和低温与Viton®GF相比
静态密封:
动态密封:
晶圆传输:
Chamber seals
Flange NW/KF centering o-rings Gaskets
Fitting and union seals
Valve seals
Door seals
Lid seals
Bonded slit valve doorsEnd effector pads
Vacuum suction parts
Property
Value
ASTM
Material Type
GF
Perfluor
Colour
Black
Indoor
Hardness: (Shore A)
74
D2240
Tensile Strength (MPa)
14.8
D412
Elongation at break (%)
279
D412
100% Modulus (MPa)
5.78
D412
Compression Set (%):
70 hrs @ 204°C25
D395
Minimum Operating
Temperature-15℃
Indoor
Maximum Operating
Temperature230℃
Indoor
Coefficient of Thermal
Expansion (um/M°C)216
Indoor
▶ Lon implant
▶ Dry ashing
▶ CVD
▶ Deposition
▶ Wet etch
▶ PVD
▶ Oxidation(LPCVD) -
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2024-05-15 FF770.pdf
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