•   具有极好的低温耐受性能

      改善了脱模/模具污染性能与Viton®GF相比

      改善了模流,减少了剪切灵敏度较低,挤出机模具膨胀率较低~65穆尼FKM

      表现出相似的热量、流体和低温与Viton®GF相比

      具有优异的抗压缩凝固性能

      表现出相似的热量、流体和低温与Viton®GF相比

    优异性能
    适用场景

    静态密封:

    动态密封:

    晶圆传输:

    Chamber seals  

    Flange NW/KF centering o-rings Gaskets

    Fitting and union seals

    Valve seals
    Door seals
    Lid seals
    Bonded slit valve doors

    End effector pads  

    Vacuum suction parts

    Property 

    Value

     ASTM

     Material Type

    GF

    Perfluor

    Colour

    Black

    Indoor

     Hardness: (Shore A)

    74

    D2240

    Tensile Strength (MPa)

    14.8

    D412

    Elongation at break (%)

    279

    D412

    100% Modulus (MPa) 

    5.78

    D412

    Compression Set (%): 
    70 hrs @ 204°C 

    25

    D395

    Minimum Operating 
    Temperature 

    -15℃

    Indoor

    Maximum Operating 
    Temperature 

    230℃

    Indoor

    Coefficient of Thermal 
    Expansion (um/M°C)

    216

    Indoor

    应用制程

    ▶  Lon implant 


    ▶  Dry ashing


    ▶  CVD 

    ▶  Deposition

     

    ▶  Wet etch 

    ▶  PVD



    ▶  Oxidation(LPCVD)

    材料性能