• ▶ 极高的耐高温热解性能，较低的热膨胀系数

    ▶ 极高的化学腐蚀气体耐受性

    ▶ 优异的耐高温性能，最高耐温达315℃

    ▶ 非常好的物理力学性能

    ▶ 很低的释气率，非常适合应用在半导体高温环境

    ▶ 极低的气体渗透率

    ▶ 合适的硬度和模量，可应用在静密封或动密封工况
     

    优异性能
    适用场景

    ▪  Chamber lid o-rings/seals
    ▪  Near wafer heater seals
    ▪  Window view seals
    ▪  NW/KF fitting centering o-rings/seals
    ▪  Quartz tube/rod seals
    ▪  Gas inlet o-rings/Gas outlet o-rings
    Door seals

    Property 

    Value

     ASTM

     Material Type

    FFKM

    Perfluor

    Colour

    Amber

    Indoor

     Hardness: (Shore A)

    75

    D2240

    Tensile Strength (MPa)

    15.92

    D412

    Elongation at break (%)

    170

    D412

    100% Modulus (MPa) 

    6.97

    D412

    Compression Set (%): 
    70 hrs @ 204°C 

    20

    D395

    Minimum Operating 
    Temperature 

    -15℃

    Indoor

    Maximum Operating 
    Temperature 

    +315℃

    Indoor

    Coefficient of Thermal 
    Expansion (um/M°C)

    210

    Indoor

    应用制程

    ▶  Diffusion


    ▶  LPCVD 


    ▶  ALD
     

    ▶  Oxidation 

    ▶  RTP



    ▶  Ashing
     

    材料性能
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