▶ 极高的纯净度，不含有任何无机物填料，最大程度降低污染物

▶ 极高的化学品耐受性

▶ 优异的耐高温性能，最高耐温达280℃

▶ 非常好的物理力学性能

▶ 极低的释气率，非常适合应用在半导体腔体内部

▶ 合适的硬度，可应用在静密封或动密封工况

静态密封：

动态密封：

晶圆传输：

Chamber lid o-rings  

Flange NW/KF centering o-rings Gas inlet / orifice seals  

Window view seals

Gate valve seals

Door seals

Pendulum valve seals  

Slit valve seals

End effector pads  

Vacuum suction parts

▶  Etch


▶  ThinFilm 


▶  CVD 

▶  Cleaning
 

▶  Lithography 

▶  PVD

▶  Stripping